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1·In this thesis, a series of SOI-MMI optical waveguide components and optical switch es are studied.

本文开展了一系列基于SOI材料的MM I型光波导器件和光开关的研究。

2·Due to high switching speed, waveguide optical switch will be applied widely to optical switching systems. It is urgent and important to develop waveguide optical switch with high performance.

波导类光开关以其高速的特性将在全光交换系统中得到广泛应用，因此研制高性能的波导型光开关单元有其重要性和迫切性。

3·The switch consists of two suspended metallic membranes supported by a serpentine flexible spring over a coplanar waveguide.

该开关的结构特点是，以共面波导上的悬空金属膜为双桥结构，并且膜桥的支撑呈折叠弹簧结构。

4·The optical time-domain echo wave length selecting module of the equipment comprises the following parts: an optical switch and an array waveguide raster.

所述设备包括由光开关和阵列波导光栅组合而成的光时域反射波长选择模块。